High-Resolution Interferometer

10716A - Keysight Technologies

The Keysight 10716A High Resolution Interferometer is used for single and multiple axis applications such as precision X-Y stages. The 10716A offers twice the resolution of conventional plane mirror interferometers and has the same excellent thermal stability as the 10706B High Stability Plane Mirror Interferometer. Measurement drift is typically of that exhibited by a conventional plane mirror interferometer. These features result in improved accuracy, repeatability, and thermal stability. However, slew rate is halved.