Laser Interferometer Position Measurement Systems
When built into manufacturing and inspection equipment, a laser interferometer system reports the position or controls the motion of a product platform with more accuracy than any other method. It allows manufacturers to produce precision products from integrated circuits to medical devices to aerospace components that meet the most stringent specifications.
- Laser Interferometers & Calibration Systems
- Laser Interferometer Position Measurement Systems
- Laser Calibration Systems
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Beam Directing and Reflecting Optics
Beam directing and reflecting optics simply reflect, bend or translate the beam, but do not typically modify the polarization, except for polarizing beam splitters. For example, mirrors, cube corners and retroreflectors are attached to objects that move in order to keep the weight down on the moving object (instead of mounting the interferometer on the moving object).
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Single Axis Interferometers
Linear, single-beam, and plane mirror interferometers measure motion on a single axis.
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Differential and Compensation Interferometers
One- and two-axis differential interferometers measure relative displacement between two objects. The wavelength tracker automatically compensates for environmental changes.
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Laser Heads
The laser head is the source of the laser beam used in all laser motion and position measurement systems. The primary difference between laser heads is in the velocity, reference frequency and optical output power. Other considerations are size, heat dissipation, and input power requirements. Which laser you choose depends primarily on the application in which it will be used. For example, semiconductor lithography systems typically have faster moving parts (stages), and therefore need higher velocities than machine tool applications.
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Multiple Axis Interferometers
Interferometers that measure two and three axes can increase accuracy, reduce alignment time and save space in high performance multi-axis systems.
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PC System Electronics
Keysight PC electronics provide state of the art laser interferometer performance in the convenient PC backplane format. Axis, servo-axis and compensation boards are available.
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Receivers and Sensors
Choose the optical receiver that meets your system performance and layout requirements. Add sensors for automatic compensation for environmental changes.
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VME System Electronics
Keysight VME electronics give the highest performance available in a laser interferometer system. Choose from a variety of axis and compensation boards.
