SPM Monitor

CS-150 - HORIBA, Ltd.

The CS-150 is a high-precision chemical concentration monitor designed for use with the SPM solutions used in semiconductor-manufacturing cleaning processes. Featuring fast response and a compact size, the CS-150 continually monitors the concentrations of the various components of the SPM solutions (H2SO4/H2O2/H2O) used to remove metal ions and organic substances. Feedback control based on the monitor output is used to keep the concentrations of the SPM solutions within the allowable ranges and to eliminate unnecessary replacement of chemicals.A short measuring cycle allows the accurate tracking of chemical concentrations, while the compact design facilitates integration with a cleaning device.