Mass Flow Controllers & Meters
Mass Flow Controllers & Meters
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Mass Flow Controllers
Enabling Productivity Through Flow Control Innovation. Our wide range of mass flow controllers are available in thermal and pressure based sensor technologies, analog and digital communication, and metal or elastomer seals.
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High Accuracy In-Situ Mass Flow Verifier
HA-MFV
The HA-MFV, High Accuracy Mass Flow Verifier is designed for use on process tools to verify mass flow control flow rates in-situ. Available with EtherCAT® or DeviceNet™ communications and measurement accuracy of 1.0% of reading, the HA-MFV can verify MFC flow with the actual process gas significantly better than older rate-of-rise devices or process chamber rate-of rise methods.
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Flow Ratio Controllers
Optimizing process performance just became easier with the DELTA™ Flow Ratio Controller (FRC). Widely used in a variety of flow splitting applications such as etching, stripping, and PECVD, the DELTA™ Flow Ratio Controller (FRC) provides users with the ability to distribute gas or gas mixtures to different zones in a process chamber.
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Vapor Mass Flow Controllers
Heated pressure-based mass flow controllers are designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas.
