NUV-PL SiC Defect Inspection System
VS6845E - Industrial Vision Technology Pte Ltd. (Visiontec)
Comply with IEC63068-3 Standard: Test method for defects using photoluminescence, Model VS-6845 SiC Wafer defect inspection system has capability on Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices.
