Plane Mirror Interferometer

10706A - Keysight Technologies

The Keysight 10706A Plane Mirror Interferometer is a dual pass interferometer used for multiple axis applications such as X-Y stages where the measurement mirror may move perpendicular to the measurement axis. The unique contribution of the 10706A is its tolerance of angular misalignment of the plane mirror reflector. The 10706A can accept a range of measurement mirror angular alignment changes.