Two Axis Differential Interferometer

10721A - Keysight Technologies

The Keysight 10721A Two Axis Differential Interferometer, when used in multiple axis applications, simultaneously makes two differential measurements linear and angular (yaw) displacement. Both measurements reference external mirror mounted to an object such as a column or inspection tool. The 10721A provides high immunity to unwanted interferometer displacement, such as thermal expansion. It is a modular, compact design with monolithic optics for maximized mechanical stability. Use of a small 3 mm beam helps decrease Abb offset error. The 10721A is similar to the 10719A Single Axis Differential Interferometer, except that it provides an additional measurement axis.