E+H Metrology GmbH
Metrology Solutions for the Semiconductor and PV/Solar World.
- 49-(0)721-83118-0
- 49-(0)721-83118-40
- info@eh-metrology.com
- Benzstrasse 5-9
Karlsruhe, D-76185
Germany
Categories
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product
High Resolution Wafer Thickness & Thickness Variation Gauge
MX 10x series
The MX10x series measure thickness and thickness variation on silicon wafers. It has a resolution of 10 nanometers and can be adapted to different thickness ranges within a few seconds.
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product
High Resolution Thickness & Surface Profiler for as-sawn Wafers
MX 70x
The MX 70x series measure Thickness, Warp, Waviness, Roughness and are usable for nanotopography.
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product
Contactless One-Point Wafer Thickness Gauge
MX 30x
The MX30x series are manual one-point Thickness gauges for silicon wafers.
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product
Contactless Wafer Gauge for Resistivity, Thickness
MX 60x
The MX60x series measure Resistivity or Sheet Resistance of silicon and other materials.
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product
Inline OEM High Resolution Thickness & Resistivity Module for PV / Solar Sorters
MX 152
To allow three thickness scans during belt transport at different wafer sizes, two measuring bars, one from top and one from bottom, hold 3 sensors each.
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product
Contactless Wafer Geometry Gauge
MX 20x series
The E+H geometry gauges are based on two heavy plates mounted parallel to each other. Embedded in the plate are a set of capacitive distance sensors. The wafer will be moved manual or automatically between the plates and measured without any movement.
