Advanced Energy
Advanced Energy shapes and transforms how power is used, delivered, and managed. Advanced Energy has devoted decades to perfecting power for its global customers. We design and manufacture highly engineered, precision power conversion, measurement, and control solutions for mission-critical applications and processes.
- 800.446.9167
+1.970.221.0108 - 1595 Wynkoop Street,
Suite 800
Denver, CO 80202
United States of America
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Chassis-Mount Power Supplies
Advanced Energy’s chassis-mount, DC-to-DC, high voltage modules work easily within OEM equipment as component power supplies. Benefit from full-range control and voltage and current monitoring.
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RF Match Networks
Enable fast, accurate, and reliable matching. Advanced Energy’s match networks expertly perform in multiple power ranges. Available in plug-and-play models or configurable units, easily install, expedite tuning, and tighten process control.
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Ideal Remote Plasma Source For Oxygen-Based Processes
Rapid OX
Reduce recombination effects and extend the lifetime of oxygen radicals thanks to Rapid OX's removable quartz liner. When compared to anodized chambers, the resultant reactive species extended lifetime improves photoresist strip rates. And because the quartz liner is easily installed or removed by the operator, it decreases downtime and significantly lowers replacement costs.
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Low Voltage Power Supplies
XF Series
The Excelsys XF low voltage power supplies provide up to 1000 W in an extremely compact 268 mm x 127 mm x 1U design. The XF family features plug-and-play architecture for maximum flexibility, allowing custom-power-solution configuration in less than five minutes. Conformal coating, ruggedization, and an operating temperature range of -55 to 70°C make it ideal for harsh environments. Offering up to 12 isolated outputs, the XF platform can provide output voltages up to 348 VDC.
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Matching Network Solution
Navio
Experience simplicity and high reliability in a single, affordable package. The Navio™ matching network leverages our power expertise to precisely match complex plasma impedance to your tuning range. It’s quick, accurate, and repeatable. Available in multiple power ranges and frequencies, choose from a standard offering or a configurable design. Installation is virtually plug-and-play with Advanced Energy’s RF power supplies. Virtual Front Panel software is available for monitoring.
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OEM Gas Analyzers
Reduce gas measurement costs with modules that measure multiple gases and eliminate field calibration. Our Andros OEM gas modules lead the way in non-dispersive infrared (NDIR) gas analysis for automotive emissions and patient monitoring.
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E-Chuck Supplies
Advanced Energy's Trek e-chuck supplies have been a staple in the semiconductor industry for decades. They allow you to improve throughput, virtually eliminate sticky wafer and wafer popping issues, and reduce backside gas errors.
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Featured Accessories
Get the most out of your AE products. Our product accessories can make an excellent AE product even better. From software to probes, find the right accessory to enhance and transform your application processes or analysis.
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Electrostatic Products
We offer electrostatic measurement instruments for electrostatic discharge (ESD) and high-performance applications. Select from our reliable electrostatic sensors and detectors, voltmeters, charge plate monitors, and surface resistance/resistivity meters.
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Digitally-Tuned Matching
Navigator II
The Navigator® ll is equipped with microprocessor-controlled, stepper-motor drives, and advanced tuning algorithms — enabling optimized RF power. An optional internal Z’Scan® II RF sensor provides real-time analysis of process power and impedance — allowing you to quickly identify and significantly reduce process variability. Optional Virtual Front Panel software is available for monitoring and control through a user’s computer.
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Rack-Mount Power Supplies
Explore rack-mount high voltage power supplies that feature IGBT switch mode technology or active power factor correction. And check out our rack-mount modules equipped with disc sets, which are ideal for ion-beam and electron-beam systems and X-ray equipment. Choose from standard modules or customize.
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Non-Contacting Voltmeters
Advanced Energy's Trek and Monroe non-contacting voltmeters offer high accuracy, non-contact measurements that are insensitive to variations in probe-to-surface distances. They also help prevent arc-over between probes and measured surfaces.
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FluorOptic Fiber Optic Temperature Sensors
Advanced Energy’s Luxtron® Fiber Optic Temperature Sensors enable customer innovation in complex applications for a wide range of industries including semiconductor equipment, industrial, manufacturing, telecommunications, data center computing, and medical. Based on Fluoroptic® technology, each individual product can be configured for specific applications.
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High-Power Density
Apex
The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
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Unprecedented Power Control
Ascent AP Series
Building on AE®’s premier bipolar pulsed-DC technology, Ascent® AP power supplies extend your ability to optimize output with advanced pulse shaping, as well as four-block progressive arc management that includes full voltage reversal and self-adjusting arc parameters. This compact solution’s patented pulsing technology proactively inhibits arcs, while its wide operational range unlocks material options to extend single- and dual-magnetron process flexibility and material innovation.
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TREK, INC.
Designs and Manufactures EOS/ESD Measurement Instrumentation, Electrostatic Voltmeters and High-Voltage Power Amplifiers. Custom OEM and Standard Products are available.
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TEGAM Inc.
TEGAM designs, manufactures and calibrates instrumentation that impacts your daily life in surprising ways. Our goal is to make your measurement task easier, faster and more accurate. We continuously invest in R&D of products and calibration techniques that allow you to make your critical measurements with the highest confidence. Our electrical measuring capabilities include temperature, RF power, and micro-Ohms.
