OAI
OAI is a leading manufacturer of reliable, precision equipment for MEMS, semiconductors, nanotechnology, cleanroom automation, and for UV light measurement.
- 800-843-8259
408-232-0600 - 408-433-9904
- sales@oainet.com
- 464 South Hillview Drive
Milpitas, CA 95035
United States
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Automated Front & Backside Mask Aligner System
Model 6000
With over 4 decades of manufacturing in the semiconductor industry, OAI meets the growing challenge of a dynamic market with an elite class of production photolithography equipment. Built on the proven OAI modular platform, the Model 6000 has front and backside alignment that is fully automated with a submicron printing capability as well as submicron top to bottom front side alignment accuracy which delivers performance that is unmatched at any price. Choose either topside or optional backsi...show more -
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Automated I-V/AOI/EL and Sorting System
OAI’s High Performance In-line Automated-I-V Testing, AOI/EL Inspection and Sorting/Binning System for Various Si Solar Cells. The 10000A-I-V System is a unique and reliable I-V testing, AOI/EL Inspection and Sorting / Binning system for testing of Mono, Multi-Si, C-HJT and other full Size (156mm x 156mm) and/or Cut-cell (156mm x 39mm or 156mm x 31.2mm or other custom sizes) Si Solar Cells.
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Automated Mask Aligner with Integrated Mask Changer
Model 6000A-MC
The Model 6000A-MC is a precision system combining OAI’s Model 6000, Automated Production Mask Aligner, with an integrated mask changer. The mask changer can handle from 10 to 150 masks. Ideal for both semiconductor and bio-tech applications. It also is designed with a bar code reader to assure each mask is coordinated to the right process. Please contact OAI for further product information.
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Calibrated Solar Reference Cell
To insure repeatable testing on any solar simulator, OAI offers 2cm x 2cm calibrated reference cells. Standard reference cell calibration cycles can be set up by OAI''s calibration laboratory to insure that your reference cell maintains certification.
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Calibration Services
For over 25 years, OAI (Optical Associate Inc.), is the leader in NIST traceable calibration of instruments for measuring Ultra Violet (UV) light. Originally designed to meet the demanding needs of the semiconductor wafer fabrication industry, OAI developed the most repeatable NIST traceable calibration in the industry.
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Continuous Wave Solar Power Meter
The OAI Continuous Wave Solar Power Meter is an essential analytical tool for measuring the irradiance (in Suns) of Continuous Wave Solar Simulators. OAI’s Solar Power Meters feature unique features not found in other Solar Meters. This versatile meter can display a wide variety of cell characteristics that include: cell type, window type, cell size, and temperature measurement device type. The OAI Continuous Wave Solar Power Meter can sample and display a continuous reading or peak reading. The...show more -
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Custom Solutions for Mask Aligners
OAI offers custom designed solutions built to your unique specification.
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Custom Solutions for UV Intensity Meters & Radiometers
OAI offers custom designed solutions built to your unique specification.
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DUV Mask Aligner
Model 200E
OAI’S Model 200E DUV Mask Aligner performs all the functions of the tabletop Model 200 Mask Aligner but utilizes a 185nm Excimer Lamp as the UV light source. It is used for Biotechnology Processing.
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Enhanced UV Light Source
Model 30E
The Model 30E Enhanced UV Lightsource is highly efficient and may be utilized in a variety of applications. Light is collected by an ellipsoidal reflector and focused on an integrating/condensing lens array to produce uniform illumination at the exposure plane. This UV light source is available in various beam sizes up to 24 inches square with output spectra ranging from 220 nm to 450 nm, using the appropriate lamp (included). Output power ranges from 200 watts to 5 kilowatts. All OAI UV Lightsources are easily equipped with quick-change filter assemblies, enabling the user to customize the output spectrum with little effort. Optional remote exhaust fans are available.
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Exposure Systems
Model 2000AF & 2000SM
The OAI Model 2000 Exposure Systems may be configured as either an edge-bead exposure system (2000SM) or a flood exposure system (2000AF); both configurations are based on OAI’s proven, time-tested platform.
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Exposure Systems
Model 2012AF & 2012SM
The Model 2012AF Flood Exposure System provides a cost-effective method for automated flood exposure. Designed to accommodate wafers from 8” to 300mm, the tool features automated FOUP loading. Mask and substrate changeover can be accomplished quickly and easily adding to both versatility and high-volume throughput of this production tool.The Model 2012SM Automated Edge-bead Exposure System provides a cost-effective method for edge-bead removal using standard shadow mask technology. Designed to a...show more -
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Flash Solar Power Meter
OAI’s Flash Solar Power Meter is a versatile measurement tool used for measuring the irradiance (in Suns) from Flash Solar Simulators. Flash Solar Simulators are commonly used in the production of solar panels. Integrated into the solar cell production line, this meter calibrates the flash solar simulator allowing for constant and repeatable irradiance output. By sampling at speeds up to 4000 Hz, the flash pulse temporal profile can be recorded in the meter’s memory and downloaded to a USB 2.0 port on a PC for further analysis.
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Front & Backside, Semi-Automatic Mask Aligner
Model 800E
The OAI Model 800E front and backside, semi-automatic mask aligner system offers advanced features and specifications found most often in costly automated production mask aligners. With the development of this mask aligner, OAI meets the growing challenge of the dynamic semiconductor and MEMS market with a new class of mask aligners that are engineered for R&D and low volume production.
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Handheld Surface & Volume Low Resistivity Meter for Conductive Materials
Loresta AX
The Loresta AX Resistivity Meter a handheld unit measures the low resistivity of samples with consistent accuracy. This resistivity meter measures resistivity using a wide variety of probes. The Loresta AX uses a standard RCF that enables the user to input other RCF''s if known.