Electrogrip Company
Since 1985 Electrogrip has provided nanofabrication system support with: electrostatic chucks, high voltage power supplies, control systems, and custom vacuum chambers and hardware.
- 412 247 0992
- 412 362 0991
- mail@electrogrip.com
- 6945 Lynn Way
Pittsburgh, PA 15208
United States
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Analytical Software for Microscopy
SPIP
SPIP™ or Scanning Probe Image Processor - is an advanced software package for processing and analyzing microscopic images at nano- and microscale. It has been developed as a proprietary software by Image Metrology and is unique in the microscopy and microscale research market. With the high level of usable features, SPIP provides industrial and academic researchers with an advanced toolkit for working with microscope images, incl. extracting data from most microscopy file types, cleaning and enh...show more -
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Electrostatic Chuck
CP Series
'CP' electrostatic chucks all employ a Chuck Puck, bolted onto a Service Base. Standard CP chucks operate between -60 and +120 deg. C.
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Electrostatic Chucks
Chucks grip for micropatterning, temperature control, or robotics ...*insulating substrates,*hard disk drive head substrates,*semiconductor wafers,*InP-coated sapphire,*metal foils,*... and many other materials.
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EUV (Extreme UltraViolet) Chucks
Lightweighted and low-expansion chucks with 10nm active-area flatness are required in EUV lithographic tools. These chucks also have low outgassing and low particle generation.
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Gas Flow Controller
GFC Series
The GFC series enables quick interchange with standard MFCs: same mechanical outline, 4-VCR connectors on standard model, and 15-pin analog connector.
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Gas Flow Controller
GC-3 Controller
The GC-3 system controller permits an existing system to
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Glass-Gripping Chucks
Electrogrip is able to grip through one substrate to grip a second masking substrate.
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High Temperature Chucks
High temperature electrostatic chucks are available for the ranges -60 to +400 deg. C, and for 350 to 600 deg. C. Different materials and constructions are used in these two ranges.
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High Voltage Power Supplies
Isolating Power Couplers
Power & Telemetry Isolation: Use these power couplers with the DR5 and DR6 systems ...
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High Voltage Power Supplies
DR4 Series
The DR4 driver is a high-voltage power supply with *adaptive grip and release; *two bipolar outputs capable of up to +/-6kV continuous output, and* outputs may be floated up to 4kV from ground at plasma bias potential.
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High Voltage Power Supplies
DR6 Series
The DR6 system employs a DR6A 'base station' which connects between the machine host computer and a DR6V high voltage module.
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High Voltage Power Supplies
DR5 Series
The DR5 system comprises: DR5A host controller; and DR5V high-voltage chuck power supply with adaptive grip and release.
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Metal Foil Chucks
Electrostatic chucks are the most reliable solution for gripping delicate, microfabricated metal foils - even in air. These chucks induce no distortion, are easily cleaned, are amazingly robust, economically priced, and exhibit uniform grip forces over their entire area.
